Silicon Carbide SiC

Tlhaloso

Silicon Carbide Wafer SiC, e thata ka ho fetisisa, e entsoeng ka maiketsetso e entsoeng ka silicon le carbon ka mokhoa oa MOCVD, le lipontšo.lekhalo la eona le ikhethang la sehlopha se pharaletseng le litšobotsi tse ling tse ntle tsa katoloso e tlase ea mocheso, mocheso o phahameng oa ts'ebetso, ho felloa ke mocheso o motle, tahlehelo e tlase ea ho switjha le ho tsamaisa, ho sebetsa hantle haholo, ho sebetsa ka mocheso o phahameng le matla a matla a ho senyeha ha masimo a motlakase, hammoho le maqhubu a mangata. boemo.Silicon Carbide SiC at Western Minmetals (SC) Corporation e ka fanoa ka boholo ba 2 ″ 3' 4" le 6 ″ (50mm, 75mm, 100mm, 150mm) bophara, ka mofuta oa n, semi-insulating kapa dummy wafer bakeng sa indasteri. le ts'ebeliso ea laboratori.Tlhaloso efe kapa efe e hlophisitsoeng ke ea tharollo e phethahetseng ho bareki ba rona lefatšeng ka bophara.

Lisebelisoa

Boleng bo phahameng ba 4H/6H Silicon Carbide SiC bafer e nepahetse bakeng sa ho etsa lisebelisoa tse ngata tsa elektroniki tse potlakileng, tse phahameng haholo le tse nang le matla a phahameng joalo ka Schottky diode & SBD, MOSFETs & JFETs, joalo-joalo. hape ke thepa e lakatsehang lipatlisisong le nts'etsopele ea li-insulated-gate bipolar transistors le thyristors.E le sesebelisoa se hlahelletseng sa semiconducting sa moloko o mocha, Silicon Carbide SiC wafer e boetse e sebetsa e le sesebelisoa se sebetsang hantle sa mocheso likarolong tse matla tsa LED, kapa e le setsi se tsitsitseng le se tsebahalang bakeng sa ho holisa GaN layer molemong oa boithuto ba mahlale ba nakong e tlang.

Botsa hona joale

Lintlha

Li-tag

Tlhaloso ea Setsebi

Silicon Carbide SiC

Silicon Carbide SiCho Western Minmetals (SC) Corporation e ka fanoa ka boholo ba 2″ 3' 4“ le 6 ″ (50mm, 75mm, 100mm, 150mm) bophara, ka mofuta oa n, semi-insulating kapa dummy wafer bakeng sa ts'ebeliso ea indasteri le laboratori. .Tlhahiso efe kapa efe e hlophisitsoeng ke ea tharollo e phethahetseng ho bareki ba rona lefatšeng ka bophara.

Linear Foromo	SiC
Boima ba Molek'hule	40.1
Sebopeho sa kristale	Wurzite
Ponahalo	Tiileng
Melting Point	3103±40K
Ntlha e belang	N/A
Boima ba 300K	3.21 g/cm³
Lekhalo la Matla	(3.00-3.23) eV
Ho hanyetsa ka hare	>1E5 Ω-cm
Nomoro ea CAS	409-21-2
Nomoro ea EC	206-991-8

Che.	Lintho	Tlhaloso e Tloaelehileng
1	SiC boholo	2"	3"	4"	6"
2	Diameter mm	50.8 0.38	76.2 0.38	100 0.5	150 0.5
3	Mokhoa oa Kholo	MOCVD	MOCVD	MOCVD	MOCVD
4	Mofuta oa conductivity	4H-N, 6H-N, 4H-SI, 6H-SI
5	Ho hanyetsa Ω-cm	0.015-0.028;0.02-0.1;>1E5
6	Boitloaelo	0°±0.5°;4.0° ho ea ho <1120>
7	Botenya μm	330±25	330±25	(350-500)±25	(350-500)±25
8	Sebaka sa Mathomo a Flat	<1-100>±5°	<1-100>±5°	<1-100>±5°	<1-100>±5°
9	Bolelele ba Pele ba Botho ba mm	16±1.7	22.2±3.2	32.5±2	47.5±2.5
10	Sebaka sa Bobeli sa Flat	Silicon e shebane holimo: 90 °, ho ea ka nako ea oache ho tloha sephara se seholo ± 5.0 °
11	Bolelele ba Bokhabane ba Bobeli mm	8±1.7	11.2±1.5	18±2	22±2.5
12	TTV μm max	15	15	15	15
13	Inamela μm max	40	40	40	40
14	Warp μm max	60	60	60	60
15	Kenyelletso ea moeli mm max	1	2	3	3
16	Micropipe Density cm-2	<5, indasteri;<15, lab;<50, bohlanya
17	Dislocation cm-2	<3000, indasteri;<20000, lab;<500000, dummy
18	Surface Roughness nm max	1(E bentšitsoeng), 0.5 (CMP)
19	Mapetso	Ha ho letho, bakeng sa boemo ba indasteri
20	Lipoleiti tsa Hexagonal	Ha ho letho, bakeng sa boemo ba indasteri
21	Mengwapo	≤3mm, bolelele bohle bo ka tlase ho bophara ba substrate
22	Li-Chips tsa Edge	Ha ho letho, bakeng sa boemo ba indasteri
23	Ho paka	Sets'oants'o se le seng sa wafer se tiisitsoeng ka mokotleng oa aluminium composite.

Silicon Carbide SiC 4H/6Hsephaphatha sa boleng bo holimo se loketse ho etsoa ha lisebelisoa tse ngata tsa elektroniki tse potlakileng, tse phahameng haholo le tse nang le matla a phahameng joalo ka Schottky diode & SBD, MOSFETs & JFETs, joalo-joalo. Hape ke ntho e lakatsehang lipatlisiso le nts'etsopele ea li-insulated-gate bipolar transistors le thyristors.E le sesebelisoa se hlahelletseng sa semiconducting sa moloko o mocha, Silicon Carbide SiC wafer e boetse e sebetsa e le sesebelisoa se sebetsang hantle sa mocheso likarolong tse matla tsa LED, kapa e le setsi se tsitsitseng le se tsebahalang bakeng sa ho holisa GaN layer molemong oa boithuto ba mahlale ba nakong e tlang.